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Please use this identifier to cite or link to this item: http://localhost:8080/xmlui/handle/123456789/30936
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dc.contributor.authorLabachelerie, Michel de-
dc.date.accessioned2024-10-06T08:24:14Z-
dc.date.available2024-10-06T08:24:14Z-
dc.date.issued2004-
dc.identifier.isbn2746208172-
dc.identifier.urihttps://di.univ-blida.dz/jspui/handle/123456789/30936-
dc.description327-IV p.: ill.; 25 cmfr_FR
dc.language.isofrfr_FR
dc.publisherHermès science publicationsfr_FR
dc.relation.ispartofseriesTraité EGM;-
dc.subjectMicrotechnologiefr_FR
dc.subjectSystèmes microélectromécaniquesfr_FR
dc.subjectDispositifs à couches mincesfr_FR
dc.titleTechniques de fabrication des microsystèmes .1, Structures et microsystemes électromecaniques en couches mincesfr_FR
dc.typeBookfr_FR
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