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Please use this identifier to cite or link to this item: http://localhost:8080/xmlui/handle/123456789/30936
Title: Techniques de fabrication des microsystèmes .1, Structures et microsystemes électromecaniques en couches minces
Authors: Labachelerie, Michel de
Keywords: Microtechnologie
Systèmes microélectromécaniques
Dispositifs à couches minces
Issue Date: 2004
Publisher: Hermès science publications
Series/Report no.: Traité EGM;
Description: 327-IV p.: ill.; 25 cm
URI: https://di.univ-blida.dz/jspui/handle/123456789/30936
ISBN: 2746208172
Appears in Collections:Livres

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